Method and laser system for generating secondary radiation

A laser system for generating secondary radiation, the laser system comprising:

• a laser device configured to provide a pulse sequence comprising laser pulses, wherein
• the pulse sequence has a prepulse and a main pulse trailing the prepulse,
• a pulse energy of the prepulse is between 2 μJ und 200 μJ, and a pulse duration of the prepulse is between 200 fs and 5 ps,
• a pulse energy of the main pulse is between 2 mJ and 50 mJ, and a pulse duration of the main pulse is between 15 fs and 300 fs, and
• a pulse time interval between the prepulse and the main pulse is between 1 ps and 1 ns,
• wherein the laser system is configured to apply the pulse sequence of laser pulses to a target material in a target region, wherein interaction of the target material with the pulse sequence generates secondary radiation.