Apparatus and system for transferring substrate

A substrate transfer apparatus, comprising:

• a main body on which a carrier is configured to be loaded and which is configured to move in a first direction or a second direction perpendicular to the first direction;
• a first wheel assembly disposed inside the main body, and comprising a first shaft extending in the second direction and a first traveling wheel rotatably coupled to the first shaft;
• a second wheel assembly disposed inside the main body, and comprising a second shaft extending in the first direction and a second traveling wheel rotatably coupled to the second shaft;
• and
• a lift disposed inside the main body and configured to move each of the first wheel assembly and the second wheel assembly up and down,
• wherein the lift comprises:
• a drive motor comprising a drive shaft extending in the second direction and a drive motor configured to generate a rotational force, the drive motor being coupled to the second wheel assembly;
• a drive plate coupled to the first wheel assembly and extending in the first direction;
• and
• a link assembly coupled to the drive motor and the drive plate.

A substrate transfer system, comprising:

• a grid rail comprising a first rail extending in a first direction and a second rail extending in a second direction perpendicular to the first direction;
• and
• a substrate transfer apparatus configured to move in the first direction or the second direction on the grid rail to transfer a substrate,
• wherein the substrate transfer apparatus comprises:
• a main body on which a carrier configured to store the substrate is loaded;
• a first wheel assembly comprising a first shaft extending along the second direction, a first traveling wheel rotatably coupled to the first shaft, and a moving plate coupled with the first shaft, the first wheel assembly being configured to move the main body along the first rail;
• a second wheel assembly comprising a second shaft extending along the first direction, a second traveling wheel rotatably coupled to the second shaft, and a base plate coupled with the second shaft, the second wheel assembly being configured to move the main body along the second rail;
• and
• a lift configured to move the first wheel assembly up and down between a first lower position at which the first wheel assembly is in contact with the first rail and a first upper position higher than the first lower position, and to move the second wheel assembly up and down between a second lower position at which the second wheel assembly is in contact with the second rail and a second upper position higher than the second lower position.