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US 2026/0018441 A1Published application
Systems for transporting a plurality of semiconductor structures
AssigneeGlobalWafers Co., Ltd.
InventorsPeter D. Albrecht, Brian Schulte, William L. Luter
Life of this patent
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Abstract
Systems for transporting a plurality of semiconductor structures, wafer boats for holding the plurality of semiconductor structures and methods for heating a set of semiconductor wafers. In some embodiments, the wafer boat frame is made of a metal and the combs are made of quartz. The wafer boats may include one or more combs that are able to float within a comb holder during heating of the wafer boat.
Claims14
A system for transporting a plurality of semiconductor structures comprising:
- a wafer boat for supporting a plurality of semiconductor structures, the wafer boat comprising:
- a plurality of support surfaces for supporting a plurality of semiconductor structures;
- a lower end plate;
- an upper end plate, the plurality of support surfaces being disposed between the lower end plate and the upper end plate;
- a back plate, the lower end plate and upper end plate extending from the back plate;
- and
- a wafer boat mount connected to the lower end plate, the wafer boat mount defining a wafer boat mount recess;
- a slide assembly for moving the wafer boat along a slide axis, the slide assembly comprising:
- a mounting ball, the mounting ball being partially received in the wafer boat mount recess when the slide assembly is connected to the wafer boat;
- and
- a support frame disposed below the wafer boat when the slide assembly is connected to the wafer boat an in a vertical orientation, wherein the support frame supports the mounting ball.
8 more elements
A system for transporting a plurality of semiconductor structures comprising:
- a wafer boat for supporting a plurality of semiconductor structures, the wafer boat comprising:
- a plurality of support surfaces for supporting a plurality of semiconductor structures;
- a lower end plate;
- an upper end plate, the plurality of support surfaces being disposed between the lower end plate and the upper end plate;
- a back plate, the lower end plate and upper end plate extending from the back plate;
- and
- a hook that extends from the back plate;
- a slide assembly for moving the wafer boat along a slide axis, the slide assembly comprising:
- a support frame disposed below the wafer boat when the slide assembly is connected to the wafer boat;
- and
- a catch attached to the support frame, the catch being disposed within the hook when the wafer boat is connected to the slide assembly, wherein the catch and hook are sized to allow the catch to slide laterally within the hook.
8 more elements
Dependencies are inferred from the claim text.