Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus

A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising:

• (a) supplying a precursor to a substrate;
• (b) supplying a reactant to the substrate;
• (c) supplying a regulating agent, which regulates an amount of at least one selected from the group of a molecule of the precursor and a molecule of the reactant adsorbed on the substrate, to the substrate;
• (d) performing a process in which at least one selected from the group of (a) and (b) overlaps (c);
• and
• (e) after (d), performing (a) or (b) which overlaps (c) in (d), independently of (c).

A substrate processing apparatus, comprising:

• a precursor supply system configured to supply a precursor to a substrate;
• a reactant supply system configured to supply a reactant to the substrate;
• a regulating agent supply system configured to supply a regulating agent to the substrate;
• and
• a controller configured to be capable of controlling the precursor supply system, the reactant supply system, and the regulating agent supply system so as to perform a process including:
• (a) supplying the precursor to the substrate;
• (b) supplying the reactant to the substrate;
• (c) supplying the regulating agent, which regulates an amount of at least one selected from the group of a molecule of the precursor and a molecule of the reactant adsorbed on the substrate, to the substrate;
• (d) performing a process in which at least one selected from the group of (a) and (b) overlaps (c);
• and
• (e) after (d), performing (a) or (b) which overlaps (c) in (d), independently of (c).