Adaptive dwell time microscopy
AssigneeFEI Company
InventorsErik Kieft, Ruud Krijnen, Lambertus de Vries, Bert Freitag, Maarten Bischoff, Pybe Faber, Christiaan Kok, Mark van der Zande, Jeroen Horikx
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AssigneeFEI Company
InventorsErik Kieft, Ruud Krijnen, Lambertus de Vries, Bert Freitag, Maarten Bischoff, Pybe Faber, Christiaan Kok, Mark van der Zande, Jeroen Horikx
Estimating the term…
A method for adaptive pixel dwell time usage in a microscope that includes scanning a beam emitted by a beam source over a sample in a scan pattern such that the beam interacts with the sample at a first scanning location according to the scan pattern. In some examples, the method includes monitoring, by at least using a detector of the microscope, a first cumulative number of particles associated with the first scanning location of the sample such that the first cumulative number of particles correspond to an interaction of the beam with the sample at the first scanning location. In some examples, the method includes moving, after a first dwell time and before a first dwell period elapses, the beam to a second scanning location of the sample according to the scan pattern if a signal criterion is met such that the signal criterion is based on the first cumulative number of particles.
A method for adaptive pixel dwell times usage in a microscope comprising:
A non-transitory computer readable medium having stored thereon computer-readable instructions that, when executed by a processor, cause the processor to perform operations comprising:
A method for multi-scanning in a microscope comprising:
Dependencies are inferred from the claim text.