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US 2026/0016618 A1Published application
Optical member and method of producing optical member
AssigneeFUJIFILM Corporation
InventorsHiroki TAKAHASHI, Tomokazu UMEZAWA, Takeshi MINEGISHI
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Abstract
Provided are an optical member including an optical substrate having a smooth surface and a silicon oxide film provided on the optical substrate, in which the silicon oxide film has a fine uneven structure on a surface thereof, comprises a water-repellent film containing a fluorine compound on the surface of the fine uneven structure, and a surface of the water-repellent film has an adhesion energy of 0.2 mN/m to 6 mN/m, and a method of producing an optical member.
Claims13
An optical member comprising:
- an optical substrate having a smooth surface;
- and
- a silicon oxide film provided on the optical substrate,
- wherein the silicon oxide film has a fine uneven structure on a surface thereof,
- the optical member includes a water-repellent film containing a fluorine compound on the surface of the fine uneven structure, and
- a surface of the water-repellent film has an adhesion energy of 0.2 mN/m to 6 mN/m.
3 more elements
A method of producing an optical member, comprising:
- a film forming step of forming a silicon oxide film on one surface of an optical substrate by a vapor phase film forming method;
- a mask forming step of forming an etching mask on the silicon oxide film;
- an etching step of etching the silicon oxide film by a vapor phase etching method through the etching mask to form a fine uneven structure on a surface of the silicon oxide film;
- and
- a coating step of forming a water-repellent film containing a fluorine compound on a surface of the fine uneven structure,
- wherein in the etching step, etching is performed until a distance from a surface of the silicon oxide film on an optical substrate side to an apex of a maximum protrusion portion of the fine uneven structure is less than a film thickness of the silicon oxide film immediately after the film formation.
3 more elements
Dependencies are inferred from the claim text.