Multi-stage dynamic vacuum feedthrough
AssigneeApplied Materials, Inc.
InventorsBHARATH SWAMINATHAN, ANANTHA SUBRAMANI, FARZAD HOUSHMAND, LUIS MARTINEZ
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Abstract
Embodiments described herein relate to an apparatus that includes a first adapter that includes a plurality of first concentric separators, and a second adapter over the first adapter, where the second adapter includes a plurality of second concentric separators. In an embodiment, the second concentric separators are interleaved with the first concentric separators. In an embodiment, a sealing medium is provided between each of the plurality of first concentric separators, and the second concentric separators are inserted into a surface of the sealing medium.
Claims20
An apparatus, comprising:
- a first adapter, wherein the first adapter comprises a plurality of first concentric separators;
- a second adapter over the first adapter, wherein the second adapter comprises a plurality of second concentric separators, wherein the plurality of second concentric separators are interleaved with the plurality of first concentric separators;
- and
- a sealing medium between each of the plurality of first concentric separators, wherein the plurality of second concentric separators are inserted into a surface of the sealing medium.
An apparatus, comprising:
- a shaft;
- a first adapter around the shaft, wherein the first adapter comprises a plurality of first concentric separators;
- a second adapter around the shaft, wherein the second adapter comprises a plurality of second concentric separators wherein one of the plurality of first concentric separators is between each pair of adjacent second concentric separators;
- and
- a sealing medium between each pair of first concentric separators, wherein the plurality of second concentric separators extend into a surface of the sealing medium.
An apparatus, comprising:
- a chamber;
- a chuck within the chamber;
- a pedestal coupled to the chuck and extending outside of the chamber, wherein the pedestal comprises a first adapter that is interdigitated with a second adapter and a sealing medium between the first adapter and the second adapter, wherein the first adapter, the second adapter, and the sealing medium define a plurality of annular chambers between the first adapter and the second adapter, wherein the second adapter is mechanically coupled to the chuck, and wherein the second adapter and the chuck are rotatable.
Dependencies are inferred from the claim text.