Coating system, electric generator, power supply and usage thereof

Abstract

A coating system for coating a substrate by an arc discharge comprises a target holder for holding a target; a substrate holder arranged along an emission axis behind the target holder for holding a substrate to be coated by the target; an anode for generating an arc discharge between the target holder and the anode, wherein the anode is arranged between the target holder and the substrate holder; an manipulation system arranged along the emission axis behind the anode, which is arranged to generate an electric and/or magnetic field for influencing a plasma propagating from the target holder along the emission axis by the arc discharge. A method for generating a plasma by an arc discharge and for manipulating the plasma by a magnetic field generated by one or more than one electromagnetic coil disposed along the emission axis behind the anode.

Dependencies are inferred from the claim text.