Observation Assistance Device

Abstract

An observation assistance device for a sample includes an observation position display unit that displays, in correspondence with an image display section, positions of a plurality of captured images of the sample which are captured by a charged particle beam device, a display processing unit that controls the observation position display unit, and a representative image selection processing unit that selects a representative image on the basis of the plurality of captured images, in which the display processing unit controls the representative image to a size that is easy to view and displays the representative image on the observation position display unit in response to a change in a magnification of the image display section.

Dependencies are inferred from the claim text.