Physical Quantity Sensor And Physical Quantity Detection Device
AssigneeSeiko Epson Corporation
InventorsMasayuki OTO, Kenta SATO
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor 10 includes a base portion 21, a support portion 22 that supports the base portion 21, a plate-shaped movable portion 24 extending in one direction from the base portion 21 via a hinge portion 23, a physical quantity detection element 40 bonded to the base portion 21 and the movable portion 24 across the hinge portion 23, a package 50 that supports the support portion 22 in a fixed region 25, and a weight 30 having a pair of recessed portions 32 recessed toward a center of gravity 80 of a weight portion 31 when viewed in a direction perpendicular to a main surface 24a of the movable portion 24.
Claims6
A physical quantity sensor comprising:
- a base portion;
- a support portion configured to support the base portion;
- a plate-shaped movable portion extending in one direction from the base portion via a hinge portion;
- a physical quantity detection element bonded to the base portion and the movable portion across the hinge portion;
- a package configured to support the support portion in a fixed region;
- and
- a weight having a pair of recessed portions recessed toward a center of gravity of a weight portion when viewed in a direction perpendicular to a main surface of the movable portion.
Dependencies are inferred from the claim text.