High temperature precursor gas delivery manifold

An apparatus, comprising:

• a monolithic gas delivery manifold, wherein the monolithic gas delivery manifold comprises:
• a gas line, wherein a gas input to the gas line is at a surface of a thermal block;
• a base, wherein the base comprises a fluidic channel, and wherein an air gap is provided between at least a portion of the thermal block and a portion of the base;
• a remote plasma source (RPS) mount above the base, wherein the RPS mount is coupled to the base by a plurality of support columns;
• a plasma isolation valve between the RPS source mount and the base;
• a vertical pipe fluidically coupled to the gas line;
• and
• a chamber, wherein the vertical pipe is fluidically coupled to an interior of the chamber.

An apparatus, comprising:

• a chamber;
• a gas delivery manifold fluidly coupled to the chamber, wherein the gas delivery manifold comprises a gas line that is configured to be heated, wherein the gas line comprises a vertical portion and a horizontal portion;
• and
• a remote plasma source (RPS) coupled to the gas delivery manifold, wherein the RPS is fluidly coupled to an interior of the chamber by a path that passes through the gas delivery manifold.