Monitored and controlled plasma waste stream abatement apparatus and method of use thereof

Abstract

The invention comprises an apparatus and/or a method of use thereof for breaking down a waste product in a plasma, comprising the steps of: inputting the waste product through an input line into a plasma housing, the plasma housing containing the plasma; breaking down the waste product into chemical breakdown products in the plasma; generating, with a first sensor, a first signal related to the chemical breakdown products; and controlling, with a main controller provided the first signal, timing of release of the chemical breakdown products from the plasma housing, such as with the optional steps of: detecting, with a spectrometer emission lines originating within the plasma housing and/or generating, with a residual gas analyzer, a signal related to the chemical breakdown products.

Dependencies are inferred from the claim text.