Loading patent…
AssigneeTokyo Electron Limited
InventorsHyejin KIM, Gaku IKEDA, Takehiro SHINDO, Tsuyoshi MORIYA, Takuya MORI, Satoru TERUUCHI
Estimating the term…
To ensure consistency in quality of maintenance work, a maintenance work support system including a work robot for performing maintenance work for each work item includes: a sensor configured to measure a measurement-target part specified for a target work item every time maintenance work for the work item is performed; a processor; and a memory. The processor functions as: a determination unit configured to determine whether or not a measurement result measured by the sensor satisfies a work quality set for the work item; and a control unit configured to, when it is determined that the work quality is not satisfied, control an additional operation for the maintenance work for the work item to be performed until the determination unit determines that the work quality is satisfied.
A maintenance work support system including a work robot configured to perform maintenance work for each work item, the maintenance work support system comprising:
A control method for a computer of a work robot configured to perform maintenance work for each work item to perform:
A non-transitory computer-readable recording medium storing a control program for causing a computer of a work robot configured to perform maintenance work for each work item to execute:
Dependencies are inferred from the claim text.