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US 2026/0003291 A1Published application
Duv led array for an ultraviolet-ozone cleaning system
OwnerKira Purvin, Tara Chan +3inventors
InventorsKira Purvin, Tara Chan, Mitchell Faust, Hongbo Si, Sylvi Haendel
Life of this patent
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Abstract
An LED array can include a printed circuit board having a plurality of LED dies with a split circuit layout, one or more dome lenses, and a heat exchanger on a side of the circuit board opposite that of the LED dies. The LED array can be positioned in an inspection tool configured to inspect a reticle. Light from the LED array can be used to perform UV-ozone cleaning of the optical element using the light from the LED array.
Claims17
An LED array comprising:
- a printed circuit board having a plurality of LED dies, wherein the LED dies have a split circuit layout;
- at least one dome lens disposed over one or more of the LED dies;
- and
- a heat exchanger disposed on a side of the circuit board opposite that of the LED dies.
1 more element
A system comprising:
- an inspection tool configured to inspect a reticle;
- and
- an LED array disposed in the inspection tool, wherein the LED array includes:
- a printed circuit board having a plurality of LED dies, wherein the LED dies have a split circuit layout;
- at least one dome lens disposed over one or more of the LED dies;
- and
- a heat exchanger disposed on a side of the circuit board opposite that of the LED dies.
4 more elements
A method comprising:
- providing an LED array disposed in an inspection tool, wherein the LED array includes:
- a printed circuit board having a plurality of LED dies, wherein the LED dies have a split circuit layout;
- at least one dome lens disposed over one or more of the LED dies;
- and
- a heat exchanger disposed on a side of the circuit board opposite that of the LED dies;
- generating light directed at an optical element in the inspection tool using the LED array;
- and
- performing UV-ozone cleaning of the optical element using the light from the LED array.
5 more elements
Dependencies are inferred from the claim text.