Load port cleaners and operating methods thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsWon Hee LEE, Shin Hwa JUNG, Woo Jae KIM, Joo Sung PARK, Dae Woo SHIN
Life of this patent
Estimating the term…
Abstract
A load port cleaner is provided. The load port cleaner comprises a container including a lower plate, an upper plate, and a front plate disposed between the lower plate and the upper plate; first and second lower ports in the lower plate; a first front port in the front plate; a cup installed in the first front port, the cup including an opening exposed to the front, a first connection port, and a second connection port; a first pipe configured to connect the first lower port with the first connection port of the cup; and a second pipe configured to connect the second lower port with the second connection port of the cup.
Claims20
A load port cleaner comprising:
- a container including a lower plate, an upper plate, and a front plate disposed between the lower plate and the upper plate;
- first and second lower ports in the lower plate;
- a first front port in the front plate;
- a cup in the first front port, the cup including:
- an opening exposed to the front;
- a first connection port;
- and
- a second connection port;
- a first pipe configured to connect the first lower port with the first connection port;
- and
- a second pipe configured to connect the second lower port with the second connection port.
A load port cleaner comprising:
- a container including a lower plate, an upper plate, and a front plate disposed between the lower plate and the upper plate;
- first, second, third and fourth lower ports in the lower plate;
- first and second front ports in the front plate;
- a first cup in the first front port, the first cup including a first opening exposed to the front;
- a second cup in the second front port, the second cup including a second opening exposed to the front;
- a first pipe connected to the first lower port and the first cup;
- a second pipe connecting the second lower port with the second cup;
- a third pipe connecting the first cup with a particle filter;
- a fourth pipe connecting the second cup with the particle filter;
- a fifth pipe connecting the particle filter with the third lower port;
- a vacuum gauge connected to the third and fourth pipes to measure a degree of vacuum in the third and fourth pipes;
- and
- a battery supplying power to the vacuum gauge.
An operating method of a load port cleaner, the operating method comprising:
- seating the load port cleaner on a load port, the load port cleaner comprising:
- a container including a lower plate, an upper plate, and a front plate disposed between the lower plate and the upper plate;
- first and second lower ports in the lower plate;
- a first front port in the front plate;
- a cup in the first front port, the cup including:
- an opening exposed to the front;
- a first connection port;
- and
- a second connection port;
- a first pipe configured to connect the first lower port with the first connection port;
- and
- a second pipe configured to connect the second lower port with the second connection port;
- wherein the first lower port of the load port cleaner is positioned to correspond to a purge port in a base of the load port;
- wherein the second lower port of the load port cleaner is positioned to correspond to an exhaust port in the base of the load port;
- wherein the first front port of the load port cleaner is positioned to correspond to a suction cup in a door opener of the load port, so that the cup and the suction cup are in contact with each other;
- and
- providing a purge gas from the purge port, and performing suction in the exhaust port to perform a cleaning operation, the purge gas sequentially passing through the first lower port, the first pipe, the cup, the suction cup, the second pipe and the second lower port and then exiting to the exhaust port.
Dependencies are inferred from the claim text.