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US 2025/0385656 A1Published application
Thin, flexible electronic devices and associated systems and methods
AssigneeMassachusetts Institute of Technology
InventorsJeehwan Kim, Junmin Suh, Yeongin Kim
Life of this patent
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Abstract
Devices (e.g., resonators) comprising a single-crystalline material, and related systems and methods, are generally described.
Claims24
A surface acoustic wave resonator, comprising:
- a substrate;
- and
- a single-crystalline piezoelectric material positioned at least partially over the substrate;
- wherein:
- the single-crystalline piezoelectric material has a thickness of less than or equal to 300 nm and/or the resonator has a minimum detectable strain less than or equal to 0.1% at an energy consumption less than or equal to 8×10−8 Joules per measurement;
- and
- the resonator is configured such that the single-crystalline piezoelectric material resonates to generate a mechanical wave during operation of the resonator.
4 more elements
(canceled)
A device, comprising:
- a substrate comprising a cavity;
- and
- a single-crystalline material positioned at least partially over the cavity of the substrate, wherein:
- the single-crystalline material is or is part of a freestanding layer;
- and
- the single-crystalline material has a thickness of less than or equal to 300 nm.
3 more elements
(canceled)
19-26. (canceled)
A method of forming a device, comprising:
- transferring a single-crystalline material from a growth substrate to a receiving substrate such that at least a portion of the single-crystalline material is positioned over a cavity of the receiving substrate,
- wherein, after the transferring, the single-crystalline material is or is part of a freestanding layer, and the single-crystalline material has a thickness of less than or equal to 300 nm.
28-29. (canceled)
31-33. (canceled)
Dependencies are inferred from the claim text.