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US 2025/0379554 A1Published application
Piezoelectric boundary acoustic wave device with a metallic overlay
AssigneeQorvo US, Inc.
InventorsMarc Solal, Christian Huck
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Abstract
A piezoelectric boundary acoustic wave (PBAW) device includes a piezoelectric substrate, an interdigital transducer on the piezoelectric substrate, the interdigital transducer having electrodes arranged with an electrode period, a dielectric embedding layer with the electrodes embedded therein, and a metallic overlaying layer on the dielectric embedding layer.
Claims20
A piezoelectric boundary acoustic wave (PBAW) device, comprising:
- a piezoelectric substrate;
- an interdigital transducer on the piezoelectric substrate, the interdigital transducer having electrodes arranged with an electrode period;
- a dielectric embedding layer with the electrodes embedded therein;
- and
- a metallic overlaying layer on the dielectric embedding layer.
2 more elements
A piezoelectric boundary acoustic wave (PBAW) device, comprising:
- a piezoelectric substrate;
- an interdigital transducer on the piezoelectric substrate, the interdigital transducer having electrodes arranged with an electrode period;
- dielectric embedding layers with the electrodes embedded therein;
- and
- metallic overlaying layers on the dielectric embedding layer, wherein a thickness of the metallic overlaying layer is larger than the electrode period.
2 more elements
A wireless device, comprising:
- a boundary acoustic wave device, comprising:
- a piezoelectric substrate;
- an interdigital transducer on the piezoelectric substrate, the interdigital transducer having electrodes arranged with an electrode period;
- dielectric embedding layers with the electrodes embedded therein;
- and
- metallic overlaying layers on the dielectric embedding layer, wherein the piezoelectric substrate has a crystalline orientation between Y+110° and Y+130°.
3 more elements
Dependencies are inferred from the claim text.