Detecting and adjusting lamella deformation
AssigneeFEI Company
InventorsRemco Geurts, Pavel Potocek
Life of this patent
Estimating the term…
Abstract
A method including performing, with a charged particle system having a first milling setting, a first milling operation on a sample at a first time, generating a first image of the sample based on the first milling operation, determining, based on the first image, a first set of tracking features of the sample, performing, with the charged particle system having the first milling setting, a second milling operation on the sample at a second time, generating a second image of the sample based on the second milling operation, determining, based on the second image, a first change to the first set of tracking features, and adjusting the first milling setting to a second milling setting based on the first change.
Claims20
A method comprising:
- performing, with a charged particle system having a first milling setting, a first milling operation on a sample at a first time;
- generating a first image of the sample based on the first milling operation;
- determining, based on the first image, a first set of tracking features of the sample;
- performing, with the charged particle system having the first milling setting, a 6 second milling operation on the sample at a second time;
- generating a second image of the sample based on the second milling operation;
- 8
- determining, based on the second image, a first change to the first set of tracking 9 features;
- and
- adjusting the first milling setting to a second milling setting based on the first change.
A system, comprising:
- one or more computing devices;
- and
- memory storing instructions, the instructions being executable by the one or more computing devices, wherein the one or more computing devices are configured to:
- perform, with a charged particle system having a first milling setting, a first milling operation on a sample at a first time;
- generate a first image of the sample based on the first milling operation;
- determine, based on the first image, a first set of tracking features of the sample;
- perform, with the charged particle system having the first milling setting, a second milling operation on the sample at a second time;
- generate a second image of the sample based on the second milling operation;
- determine, based on the second image, a first change to the first set of tracking features;
- and
- adjust the first milling setting to a second milling setting based on the first change.
A non-transitory computing-device readable storage medium on which computing-device readable instructions of a program are stored, the instructions, when executed by one or more computing devices, causing the one or more computing devices to perform a method, comprising:
- performing, with a charged particle system having a first milling setting, a first milling operation on a sample at a first time;
- generating a first image of the sample based on the first milling operation;
- determining, based on the first image, a first set of tracking features of the sample;
- performing, with the charged particle system having the first milling setting, a second milling operation on the sample at a second time;
- generating a second image of the sample based on the second milling operation;
- determining, based on the second image, a first change to the first set of tracking features;
- and
- adjusting the first milling setting to a second milling setting based on the first change.
Dependencies are inferred from the claim text.