Substrate processing method and substrate processing apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorsKeisuke MIYAJIMA, Tomohiro TAKAHASHI, Yasuhiko NAGAI, Tadashi MAEGAWA
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AssigneeSCREEN Holdings Co., Ltd.
InventorsKeisuke MIYAJIMA, Tomohiro TAKAHASHI, Yasuhiko NAGAI, Tadashi MAEGAWA
Estimating the term…
A substrate processing method includes causing a first outer nozzle to discharge a processing liquid while causing a second outer nozzle to stop discharging a processing liquid, the first outer nozzle and the second outer nozzle arranged at positions higher than a position of the inner bath so as to be positioned opposite to each other with respect to a vertical line passing through a center of the substrate when viewed in a direction perpendicular to the substrate held on the lifter, and discharging the processing liquid toward the substrate held on the lifter, and causing the second outer nozzle to discharge the processing liquid while causing the first outer nozzle to stop discharging the processing liquid.
A substrate processing method comprising:
A substrate processing apparatus comprising:
Dependencies are inferred from the claim text.