Siloxane treatment systems including thermal hydrolyzer, catalytic reactor and membrane separator, and related methods

A system for treating a fluid containing siloxanes, silanols, silanes, and/or other silicon compounds, comprising:

• a hot box configured to receive an initial flow of the fluid, and react the initial flow with water at a temperature and pressure suitable for hydrolysis to generate a first treated flow, in which at least a portion of the siloxanes, silanols, silanes, and/or other silicon compounds is hydrolyzed to produce silicon dioxide and methane;
• a catalytic reactor configured to receive the first treated flow, and convert at least a portion of volatile organic compounds (VOCs) and dioxygen to carbon dioxide and water to generate a second treated flow;
• and
• a membrane separator configured to receive the second treated flow, and remove at least a portion of the carbon dioxide and water to generate a clean gas flow.