Cmut medical devices, fabrication methods, systems, and related methods

A method for constructing a capacitive micromachined ultrasonic transducer (CMUT) apparatus comprising:

• disposing, on a substrate, one or more peripheral walls, the one or more peripheral walls defining an outer boundary of a cavity, wherein the one or more peripheral walls comprise a width of at least 8 microns;
• disposing, on the substrate, one or more posts, the one or more posts enclosed by the one or more peripheral walls, wherein at least a portion of the one or more posts comprise a width of 1 micron to 10 microns;
• and
• disposing, on the substrate, one or more interior walls protruding from the substrate, the one or more interior walls enclosed by the one or more peripheral walls, wherein at least a portion of the one or more interior walls comprise a width of 0.5 microns to 1 micron.

A medical device comprising:

• a body;
• at least one electronic component associated with the body, the at least one electronic component including:
• at least one sensor, and
• at least one ultrasonic transducer configured to receive ultrasonic signals and thereby power the at least one sensor,
• wherein the at least one electronic component is configured to provide a response ultrasonic wave responsive to a determination by the at least one sensor.

A system comprising:

• an external device having a first ultrasonic transducer;
• a medical device configured to be positioned within a patient's anatomy, the medical device comprising:
• at least one electronic component:
• at least one sensor, and
• a second ultrasonic transducer configured to receive ultrasonic signals generated by the first ultrasonic transducer to power the at least one sensor,
• wherein the at least one electronic component is configured to provide a response ultrasonic wave to the external device responsive to a determination by the at least one sensor.

A method comprising:

• implanting an electronic component within a patient adjacent to, or within, a tumor;
• powering the electronic component using ultrasonic energy;
• detecting a water content of the tumor using a sensor of the electronic component;
• providing a response signal from the electronic component to an external device based on the detected water content;
• and
• determining a density of, or a change in density of, the tumor based on the response signal.

A medical device comprising:

• a flexible, elongated member having a distal portion configured for insertion into a vessel of a patient;
• an imaging device disposed in the distal portion of the flexible, elongated member, the imaging device comprising:
• a flexible substrate;
• a plurality of ultrasonic transducers arranged on the flexible substrate, each of the plurality of ultrasonic transducers comprising a capacitive micromachined ultrasonic transducer on complementary metal oxide silicon (CMUT on CMOS) device;
• and
• a tail extending from the flexible substrate having a plurality of connection pads.