Wafer storage container
AssigneesBum Je WOO, Pico & Tera Co., Ltd.
InventorBum Je WOO
Life of this patent
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Abstract
The present invention relates to a wafer storage container for supplying purge gas to wafers stored in a storage chamber to remove fumes from the wafers or control the humidity of the wafers. In particular, the invention relates to a wafer storage container that divides the interior of the storage chamber into a plurality of storage regions through a plurality of blocking plates, thereby restricting the vertical flow of fumes and purge gas to minimize contamination inside the storage chamber and enabling purging of wafers in the desired storage region.
Claims9
A wafer storage container comprising:
- a storage chamber in which a plurality of wafers are stored through a front opening;
- a plurality of support plates provided in a plurality in the vertical direction inside the storage chamber, each supporting each of the plurality of wafers;
- and
- a plurality of blocking plates provided between two vertically adjacent support plates among the plurality of support plates,
- wherein the storage chamber is divided into a plurality of storage regions in the vertical direction by the plurality of blocking plates, and one support plate is located in each of the plurality of storage regions.
A wafer storage container comprising:
- a storage chamber in which a plurality of wafers are stored through a front opening;
- a plurality of support plates provided in a plurality in the vertical direction inside the storage chamber, each supporting each of the plurality of wafers;
- and
- at least one or more blocking plates provided between the plurality of support plates,
- wherein the storage chamber is divided into a plurality of storage regions in the vertical direction by the blocking plate, and at least two or more support plates are located in at least one of the plurality of storage regions.
Dependencies are inferred from the claim text.