Pattern Matching Device, Pattern Measurement System, and Non-Transitory Computer-Readable Medium

A pattern matching apparatus comprising:

• a computer system configured to execute pattern matching processing between first pattern data based on design data and second pattern data representing a captured image of an electron microscope, wherein
• the computer system acquires a first edge candidate group including one or more first edge candidates based on the first pattern data,
• the computer system acquires a selection-required number, and the selection-required number represents the number of second edge candidates to be selected based on the second pattern data,
• the computer system acquires a second edge candidate group including the second edge candidates of the selection-required number based on the second pattern data,
• the computer system acquires an association evaluation value based on the first and second edge candidate groups for each of different association combinations between the first edge candidate group and the second edge candidate group,
• the computer system selects one of the combinations based on the association evaluation value, and
• the computer system calculates a matching shift amount based on the selected combination,
• wherein
• the computer system includes a learned model,
• the learned model receives an input of the second pattern data, and
• the learned model outputs a value representing a relationship between the number of first edge candidates and the selection-required number.

A pattern measuring system comprising:

• a pattern matching apparatus;
• and
• a scanning electron microscope,
• wherein the pattern matching apparatus includes:
• a computer system configured to execute pattern matching processing between first pattern data based on design data and second pattern data representing a captured image of an electron microscope, wherein
• the computer system acquires a first edge candidate group including one or more first edge candidates based on the first pattern data,
• the computer system acquires a selection-required number, and the selection-required number represents the number of second edge candidates to be selected based on the second pattern data,
• the computer system acquires a second edge candidate group including the second edge candidates of the selection-required number based on the second pattern data,
• the computer system acquires an association evaluation value based on the first and second edge candidate groups for each of different association combinations between the first edge candidate group and the second edge candidate group,
• the computer system selects one of the combinations based on the association evaluation value, and
• the computer system calculates a matching shift amount based on the selected combination.

A non-transitory computer-readable medium storing a program instruction to be executed on a computer system, the program instruction causing a computer system to function as the computer system in a pattern matching apparatus,

• wherein the pattern matching apparatus includes:
• a computer system configured to execute pattern matching processing between first pattern data based on design data and second pattern data representing a captured image of an electron microscope, wherein
• the computer system acquires a first edge candidate group including one or more first edge candidates based on the first pattern data,
• the computer system acquires a selection-required number, and the selection-required number represents the number of second edge candidates to be selected based on the second pattern data,
• the computer system acquires a second edge candidate group including the second edge candidates of the selection-required number based on the second pattern data,
• the computer system acquires an association evaluation value based on the first and second edge candidate groups for each of different association combinations between the first edge candidate group and the second edge candidate group,
• the computer system selects one of the combinations based on the association evaluation value, and
• the computer system calculates a matching shift amount based on the selected combination.