Polishing Tool, Polishing Head, Polishing Apparatus, And Polishing Method
AssigneesEnable K. K., Keio University
InventorsAnthony BEAUCAMP, Hideki OGAWA
Life of this patent
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Abstract
A polishing tool for polishing a workpiece by holding a polishing material between the workpiece and its polishing surface, the polishing tool including: a main shaft part that has the polishing surface at a front end and that extends along a polishing axis; a plurality of elastic parts that are continuous from the main shaft part and that extend radially outward; and a plurality of seat parts that are continuous to the radially outside of the plurality of elastic parts. A position at which the main shaft part connects to each of the elastic parts and a position at which the corresponding seat part connects thereto are different in a direction of the polishing axis.
Claims19
A polishing tool for polishing a workpiece by holding a polishing material between the workpiece and a polishing surface of the polishing tool, the polishing tool comprising:
- a main shaft part that has the polishing surface facing the workpiece at a front end and that extends along a polishing axis, the polishing axis being a virtual axis defined as a direction in which a center of the polishing surface approaches or moves away the workpiece;
- a plurality of elastic parts that are continuous from the main shaft part and that extend in a radially outward direction with respect to the polishing axis;
- and
- a plurality of seat parts that are continuous to a radially outside of the plurality of elastic parts, wherein
- a position at which the main shaft part connects to each of the elastic parts and a position at which the corresponding seat part connects to each of the elastic parts are different in a direction of the polishing axis, and
- when the respective seat parts are applied with equal amounts of displacement toward a same side that is either a radially inside or radially outside by a tool driving mechanism, the plurality of elastic parts elastically deform and the main shaft part is displaced so as to include an axial component with respect to the polishing axis, whereas
- when the respective seat parts are applied with different amounts of displacement toward the same side that is either the radially inside or radially outside, or the displacement toward different sides that are the radially outside and the radially inside by the tool driving mechanism, the main shaft part is displaced so as to include a radial component with respect to the polishing axis.
A polishing method for polishing a workpiece by holding a polishing material between a polishing surface of a polishing tool and the workpiece, the polishing material containing abrasive grains dispersed in a fluid, the polishing method comprising:
- disposing a plurality of driving units along a circumferential direction with reference to a polishing axis to cause each of the driving units to displace a contact point with the polishing tool in a radial direction with reference to the polishing axis, the polishing axis being a virtual axis defined as a direction in which a center of the polishing surface approaches or moves away the workpiece;
- generating a synchronization frequency signal to periodically reciprocate and displace the plurality of driving units so that increase-decrease cycles and increase-decrease phases of displacement amounts coincide with each other;
- generating a plurality of first frequency signals to periodically reciprocate and displace the plurality of driving units so that the increase-decrease cycles of the displacement amounts coincide with each other;
- generating driving signals for the respective driving units by using at least the plurality of first frequency signals;
- and
- displacing the plurality of driving units by the plurality of driving signals so as to displace the polishing surface of the polishing tool in an axial direction and a radial direction with reference to the polishing axis.
A polishing method for polishing a workpiece by holding a polishing material between a polishing surface of a polishing tool and the workpiece, the polishing material containing abrasive grains dispersed in a fluid, the polishing method comprising:
- disposing a plurality of driving units along a circumferential direction with reference to a polishing axis to cause each of the driving units to displace a contact point with the polishing tool in a radial direction with reference to the polishing axis, the polishing axis being a virtual axis defined as a direction in which a center of the polishing surface approaches or moves away the workpiece;
- generating frequency signals that are at least twice as many as a number of the driving units;
- inputting a driving signal to each of the driving units, the driving signal being obtained by superimposing at least two frequency signals among the frequency signals;
- and
- displacing the plurality of driving units by the plurality of driving signals so as to displace the polishing surface of the polishing tool in an axial direction and a radial direction with reference to the polishing axis.
Dependencies are inferred from the claim text.