Recording medium, information processing method, and information processing device
AssigneeTokyo Electron Limited
InventorMasayuki OGAWA
Life of this patent
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Abstract
A computer-readable recording medium having stored thereon a computer program that, in response to execution, causes a computer to perform a method. The method includes acquiring a moving image of a discharger of a substrate processing apparatus configured to discharge a liquid to a substrate as a processing target; inputting a frame image included in the acquired moving image into a learning model that has been machine learning-trained to receive an image of the discharger as an input and output information related to a discharge state of the liquid from the discharger; acquiring the information related to the discharge state output by the learning model; and determining appropriateness of the discharge of the liquid based on the acquired information.
Claims20
A computer-readable recording medium having stored thereon a computer program that, in response to execution, causes a computer to perform a method, the method comprising:
- acquiring a moving image of a discharger of a substrate processing apparatus configured to discharge a liquid to a substrate as a processing target;
- inputting a frame image included in the acquired moving image into a learning model that has been machine learning-trained to receive an image of the discharger as an input and output information related to a discharge state of the liquid from the discharger;
- acquiring the information related to the discharge state output by the learning model;
- and
- determining appropriateness of the discharge of the liquid based on the acquired information.
An information processing method performed by an information processing device, the method comprising:
- acquiring a moving image of a discharger of a substrate processing apparatus configured to discharge a liquid to a substrate as a processing target;
- inputting a frame image included in the acquired moving image into a learning model that has been machine learning-trained to receive an image of the discharger as an input and output information related to a discharge state of the liquid from the discharger;
- acquiring the information related to the discharge state output from the learning model;
- and
- determining appropriateness of the discharge of the liquid based on the acquired information.
An information processing device, comprising:
- one or more processor configured to:
- acquire a moving image of a discharger of a substrate processing apparatus configured to discharge a liquid to a substrate as a processing target;
- input a frame image included in the acquired moving image into a learning model that has been machine learning-trained to receive an image of the discharger as an input and output information related to a discharge state of the liquid from the discharger;
- acquire information related to the discharge state output from the learning model;
- and
- determine appropriateness of the discharge of the liquid based on the acquired information.
Dependencies are inferred from the claim text.