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US 2025/0357912 A1Published application
Resonator element, resonator, and oscillator
AssigneeSeiko Epson Corporation
InventorsYusuke Yamamoto, Ryuta Nishizawa
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Abstract
A resonator element includes: a quartz crystal substrate having a resonator portion including a resonator region and a support portion having a thickness larger than a thickness of the resonator portion; and an excitation electrode disposed in the resonator region, in which when a plate thickness variation in the resonator region of the quartz crystal substrate is set to y [nm], and an oscillation frequency is set to x [MHz], y≤329.8 exp (−x/76.7)+4.0.
Claims11
A resonator element comprising:
- a quartz crystal substrate having a resonator portion including a resonator region and a support portion having a thickness larger than a thickness of the resonator portion;
- and
- an excitation electrode disposed in the resonator region, wherein
- when a plate thickness variation in the resonator region of the quartz crystal substrate is set to y [nm], and
- an oscillation frequency is set to x [MHz],
- y≤329.8 exp (−x/76.7)+4.0.
3 more elements
Dependencies are inferred from the claim text.