Acoustic devices incorporating multilayer van der waals material
AssigneeQorvo US, Inc.
InventorRobert Aigner
Life of this patent
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Abstract
The present disclosure relates to acoustic devices incorporating a multilayer van der Waals (vdW) material(s). In various embodiments disclosed herein, a multilayer vdW material(s) is provided in various types of acoustic devices, such as surface acoustic wave (SAW) devices, bulk acoustic wave (BAW) devices, cross bulk acoustic resonator (XBAR) devices, and acoustic gyroscope devices, to help manipulate (e.g., separate, trap, guide, etc.) a shear acoustic wave(s) and/or a longitudinal acoustic wave(s) in the acoustic devices. By utilizing the multilayer vdW material(s), it is thus possible to improve size, thermal dissipation, and performance of the acoustic devices.
Claims20
A surface acoustic wave (SAW) device comprising:
- a substrate;
- a dielectric layer provided on the substrate;
- one or more interdigital transducers (IDTs) provided on the substrate and configured to induce a shear acoustic wave in the substrate;
- and
- a multilayer van der Waals (vdW) material provided in the dielectric layer and configured to trap the shear acoustic wave within the dielectric layer.
A guided surface acoustic wave (SAW) device comprising:
- a substrate;
- a piezoelectric layer provided over the substrate;
- one or more interdigital transducers (IDTs) provided on the piezoelectric layer and configured to induce a shear acoustic wave in the piezoelectric layer;
- and
- a multilayer van der Waals (vdW) material provided between the piezoelectric layer and the substrate to block the shear acoustic wave from entering the substrate.
A bulk acoustic wave (BAW) device comprising:
- a substrate;
- a bottom electrode provided on the substrate;
- a bottom multilayer van der Waals (vdW) material provided on the bottom electrode;
- a piezoelectric layer provided on the bottom multilayer vdW material;
- a top multilayer vdW material provided on the piezoelectric layer;
- and
- a top electrode provided on the top multilayer vdW material.
A cross bulk acoustic resonator (XBAR) device comprising:
- a substrate;
- a bottom multilayer van der Waals (vdW) material provided on the substrate;
- a piezoelectric layer provided on the bottom multilayer vdW material;
- a top multilayer vdW material provided on the piezoelectric layer;
- and
- one or more electrodes provided on the top multilayer vdW material.
An acoustic gyroscope device comprising:
- a substrate;
- a sensing acoustic resonator provided on the substrate;
- a dielectric layer provided over the sensing acoustic resonator;
- a bottom multilayer van der Waals (vdW) material provided on the dielectric layer;
- a driving acoustic resonator provided on the bottom multilayer vdW material;
- and
- a top multilayer vdW material provided over the driving acoustic resonator.
A wireless device comprising one or more acoustic devices selected from the group consisting of:
- a surface acoustic wave (SAW) device, a guided SAW device, a bulk acoustic wave (BAW) device, a cross bulk acoustic resonator (XBAR) device, and an acoustic gyroscope device.
Dependencies are inferred from the claim text.