Optical package and method of manufacture
OwnerChen-Hua Yu, Yu-Hung Lin +1inventors
InventorsChen-Hua Yu, Yu-Hung Lin, Ren-Fen Tsui
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Abstract
A method includes forming a laser diode structure including an active layer sandwiched between an n-type contact layer and a p-type contact layer; forming an n-type contact on the n-type contact layer, wherein the n-type contact includes a first noble metal; forming a p-type contact on the p-type contact layer, wherein the p-type contact includes a second noble metal; forming a conductive routing layer on the n-type contact and on the p-type contact, wherein the conductive routing layer is free of noble metals, wherein the conductive routing layer fully covers the n-type contact and the p-type contact; and forming a passivation layer over the conductive routing layer.
Claims1
A method comprising:
- forming a laser diode structure comprising an active layer sandwiched between an n-type contact layer and a p-type contact layer;
- forming an n-type contact on the n-type contact layer, wherein forming the n-type contact comprises:
- etching the n-type contact layer to form a recess;
- and
- depositing gold into the recess;
- forming a p-type contact on the p-type contact layer, wherein the p-type contact comprises a second noble metal;
- forming a conductive routing layer on the n-type contact and on the p-type contact, wherein the conductive routing layer is free of noble metals, wherein the conductive routing layer fully covers the n-type contact and the p-type contact;
- and
- forming a passivation layer over the conductive routing layer.
Dependencies are inferred from the claim text.