Laser system, laser processing method, and interposer manufacturing method

A laser processing method comprising:

• generating laser light having a second wavelength by using a laser system, and converting the second wavelength of the laser light having to generate ultraviolet laser light;
• and
• irradiating a radiation receiving object with the ultraviolet laser light to process the radiation receiving object,
• the laser system including
• a pumping laser apparatus configured to output pumping light having a first wavelength,
• a signal laser apparatus configured to output signal light having the second wavelength longer than the first wavelength,
• an optical parametric crystal configured to transmit the pumping light and the signal light and output amplified light having the second wavelength, and
• a photon flux density control mechanism configured to control photon flux densities of the pumping light and the signal light in such a way that a sum of the photon flux densities of the pumping light and the signal light at an input end of the optical parametric crystal causes an intensity distribution of the amplified light having the second wavelength to be an intensity distribution that monotonously decreases from a center of the intensity distribution toward a periphery thereof.

An interposer manufacturing method comprising:

• generating laser light having a second wavelength by using a laser system, and converting the second wavelength of the laser light having to generate ultraviolet laser light;
• and
• irradiating a radiation receiving object with the ultraviolet laser light in order to manufacture an interposer,
• the laser system including
• a pumping laser apparatus configured to output pumping light having a first wavelength,
• a signal laser apparatus configured to output signal light having the second wavelength longer than the first wavelength,
• an optical parametric crystal configured to transmit the pumping light and the signal light and output amplified light having the second wavelength, and
• a photon flux density control mechanism configured to control photon flux densities of the pumping light and the signal light in such a way that a sum of the photon flux densities of the pumping light and the signal light at an input end of the optical parametric crystal causes an intensity distribution of the amplified light having the second wavelength to be an intensity distribution that monotonously decreases from a center of the intensity distribution toward a periphery thereof.