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US 2025/0357078 A1Published application
Vacuum arrangement and method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsStephan Aulhorn, Steffen Mosshammer
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Abstract
A vacuum assembly may include a vacuum chamber housing, a transport device for transporting a substrate along a transport path within the vacuum chamber housing, a plasma source having a plasma source housing in which a cavity is provided, an electrode disposed in the vacuum chamber housing and adjacent the plasma source, and a radio frequency transmission device that ohmically couples the plasma source housing to the electrode. The plasma source may be adapted to form a plasma to which the transport path is exposed by the cavity.
Claims20
A vacuum arrangement comprising:
- a vacuum chamber housing;
- a transport device for transporting a substrate along a transport path within the vacuum chamber housing;
- a plasma source comprising a plasma source housing in which a cavity is provided, wherein the plasma source is configured to form, by the cavity, a plasma to which the transport path is exposed;
- an electrode disposed in the vacuum chamber housing beside the plasma source;
- and
- a radio frequency transmission device that ohmically couples the plasma source housing to the electrode.
3 more elements
A vacuum arrangement comprising:
- a vacuum chamber housing;
- a transport device for transporting a substrate along a transport path within the vacuum chamber housing;
- a plasma source comprising a plasma source housing in which a cavity is provided, wherein the plasma source is configured to form, by the cavity, a plasma to which the transport path is exposed;
- an electrode disposed in the vacuum chamber housing beside the plasma source;
- a first litz wire ohmically coupled to the plasma source housing;
- a second litz wire ohmically coupled to the electrode;
- wherein the vacuum chamber housing comprises a housing opening in which a vacuum feedthrough is arranged, which ohmically couples the first litz wire to the second litz wire.
4 more elements
Dependencies are inferred from the claim text.