Scanning deflector

A charged beam particle system comprising:

• a first electron detector;
• a second electron detector;
• and
• a first scanning deflector positioned between the first electron detector and the second electron detector, wherein:
• the first scanning deflector includes a first end having a first diameter and a second end having a second diameter greater than the first diameter;
• and
• the first end is oriented toward the first electron detector and the second end is oriented toward the second electron detector.

A method of using a charged beam particle system comprising:

• emitting an electron beam from an electron source, through a beam column, to a sample holder in a sample chamber, wherein the beam column includes:
• a first electron detector;
• a second electron detector;
• and
• a first scanning deflector positioned between the first electron detector and the second electron detector, wherein the first scanning deflector includes a deflector interior surface including a frustoconical shape;
• detecting, with the first electron detector, a first portion of signal electrons emitted from the sample chamber;
• detecting, with the second electron detector, a second portion of the signal electrons emitted from the sample chamber;
• and
• generating an image based on the first and second portions of the electrons.