Optical modulation via brillouin scattering in a solidly mounted waveguide
AssigneeQUALCOMM Incorporated
InventorWilli AIGNER
Life of this patent
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Abstract
Systems, devices, and techniques are described herein solidly mounted acousto-optical devices. One aspect includes a piezoelectric layer comprising a top surface and a bottom surface, waveguide on the top surface of the piezoelectric layer, a first interdigital transducer disposed on the top surface of the piezoelectric layer, wherein the first interdigital transducer is positioned on a first side of the waveguide, and a second interdigital transducer disposed on the top surface of the piezoelectric layer, wherein the second interdigital transducer is positioned on a second side of the waveguide opposite the first side.
Claims20
An acousto-optical device comprising:
- a piezoelectric layer comprising a top surface and a bottom surface;
- a waveguide on the top surface of the piezoelectric layer;
- a first interdigital transducer disposed on the top surface of the piezoelectric layer, wherein the first interdigital transducer is positioned on a first side of the waveguide;
- and
- a second interdigital transducer disposed on the top surface of the piezoelectric layer, wherein the second interdigital transducer is positioned on a second side of the waveguide opposite the first side.
A solidly mounted acousto-optic device formed by a method comprising:
- fabricating a silicon handle wafer;
- forming a piezoelectric layer having a top surface and a bottom surface, wherein the piezoelectric layer comprises an epitaxial aluminum scandium nitride (AlScN) layer, and wherein the top surface of the piezoelectric layer is formed on a surface of the silicon handle wafer;
- forming a silicon waveguide out of the silicon handle wafer on the top surface of the piezoelectric layer;
- forming a first interdigital transducer on the top surface of the piezoelectric layer, wherein the first interdigital transducer is positioned on a first side of the silicon waveguide;
- and
- forming a second interdigital transducer on the top surface of the piezoelectric layer, wherein the second interdigital transducer is positioned on a second side of the silicon waveguide opposite the first side.
A solidly mounted acousto-optical device comprising:
- an epitaxial aluminum scandium nitride (AlScN) piezoelectric layer comprising a top surface and a bottom surface;
- a silicon (Si) waveguide on the top surface of the epitaxial AlScN piezoelectric layer;
- a first interdigital transducer disposed on the top surface of the epitaxial AlScN piezoelectric layer, wherein the first interdigital transducer is positioned on a first side of the Si waveguide;
- and
- a second interdigital transducer disposed on the top surface of the epitaxial AlScN piezoelectric layer, wherein the second interdigital transducer is positioned on a second side of the waveguide opposite the first side.
Dependencies are inferred from the claim text.