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US 2025/0355264 A1Published application
Apparatus for Laser Annealing and Operating Method Thereof
AssigneeEo Technics Co., Ltd.
InventorsSangmin Lee, Seulgi Lee, Sungwook Jung, Hyukjun Kwon, Hyangrok Lee
Life of this patent
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Abstract
A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.
Claims20
An apparatus for laser annealing comprising:
- a light source configured to generate a plurality of laser beams;
- a time division superimposing device comprising at least one beam splitter configured to temporally branch the plurality of laser beams, respectively, to propagate branched beams onto different optical paths, and wherein the time division superimposing device is configured to superimpose beams emitted from a same laser, from the branched beams propagated onto different optical paths;
- an optical illumination system comprising a plurality of lenses configured to form flat-top beams homogenizing intensities of superimposed beams from a space split superimposing device;
- and
- an optical imaging system comprising a plurality of lenses configured to image each of homogenized beams, from the flat-top beams, passing through a mask onto a wafer.
2 more elements
An apparatus for laser annealing comprising:
- a stage configured to accommodate a wafer;
- a light source configured to generate a plurality of laser beams provided onto the wafer;
- an optical illumination system configured to illuminate the plurality of laser beams to a mask;
- and
- an optical imaging system configured to image beams passing through the mask on the wafer,
- wherein the optical illumination system comprises a plurality of fly eye lens arrays homogenizing intensity of each of the plurality of laser beams, and
- wherein at least one of the plurality of fly eye lens arrays is configured by intersecting a material having a light activation property and a material having no light activation property.
4 more elements
Dependencies are inferred from the claim text.