Vibration module and optical deflector

Abstract

A vibration module and an optical deflector can suppress a change in deflection angle of a movable part due to a change in static displacement of a piezoelectric body associated with a temperature change. The vibration module includes a drive element and a substrate supporting the drive element. The drive element includes a movable part, a drive unit that includes a piezoelectric body as a drive source and rotates the movable part about a rotation axis, and a fixing part that supports the movable part and the drive unit and is bonded to the substrate. The fixing part is bonded to the substrate at a plurality of portions discrete from each other with an adhesive whose elastic modulus decreases as a temperature rises, and the plurality of portions include a portion corresponding to an antinode of vibration generated in the fixing part when the movable part is resonantly driven.

Dependencies are inferred from the claim text.