Multi-azimuth illumination and imaging inspection system and method

An inspection system for inspecting using a plurality of azimuthal angles comprising:

• a stage configured to translate and rotate a sample;
• an optical sub-system comprising:
• an illumination sub-system comprising a beam-shaping channel, wherein a configuration of the beam-shaping channel controls an orientation of a beam profile of an illumination beam as projected onto the sample;
• and
• a collection sub-system comprising a detector configured to image the sample;
• and
• a controller communicatively coupled to the optical sub-system and comprising one or more processors configured to execute program instructions causing the one or more processors to:
• receive first scan data associated with a first orientation of the beam profile of the illumination beam as projected onto the sample and associated with a first scanning of the sample using a first configuration of the beam-shaping channel;
• receive second scan data associated with a second orientation of the beam profile of the illumination beam as projected onto the sample and associated with a second scanning of the sample using a second configuration of the beam-shaping channel;
• and
• identify one or more defects on the sample based on scan data associated with two or more scans comprising at least the first scan data and the second scan data.

A method for inspecting using a plurality of azimuthal angles comprising:

• performing a first scanning of a sample using a first configuration of a beam-shaping channel of an optical sub-system, wherein the first configuration of the beam-shaping channel controls an orientation of a beam profile of an illumination beam as projected onto the sample;
• receiving first scan data associated with the first scanning of the sample;
• performing a second scanning of the sample using a second configuration of the beam-shaping channel, wherein the second configuration corresponds to a second orientation of the beam profile of the illumination beam as projected onto the sample;
• receiving second scan data associated with the second scanning of the sample;
• and
• identifying one or more defects on the sample based on scan data associated with two or more scans comprising at least the first scan data and the second scan data.