Thermographic sensor with thermal transistors driven by thermo-couples

A thermographic sensor, comprising:

• a first body including:
• a first membrane and a second membrane on a first surface of the first body, the first membrane including a first thermo-couple and a first thermally insulated MOS transistor, the second membrane including a second thermo-couple and a second thermally insulated MOS transistor;
• and
• a first cavity and a second cavity in the first body and below the first membrane and the second membrane, respectively, the first cavity separated from the second cavity;
• a second body coupled to the first body by the first surface of the first body, the second body having a third cavity facing the first membrane and a fourth cavity facing the second membrane, the third cavity separated from the fourth cavity;
• and
• a shielding layer on the second body, distal to the first body, and overlapping the fourth cavity, the shielding layer configured to prevent thermal radiation from reaching the second membrane.

A thermographic sensor for sensing a thermal radiation, the thermographic sensor comprising:

• a first body including:
• a first cavity;
• a second cavity;
• a first membrane above the first cavity;
• a second membrane above the second cavity;
• a sensing circuit on the first membrane at the first cavity;
• and
• a reference circuit on the second membrane at the second cavity.