High conductance variable orifice valve
AssigneeApplied Materials, Inc.
InventorsMuhannad Mustafa, Sanjeev Baluja
Life of this patent
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Abstract
Variable orifice valves comprising a first fixed plate, a second fixed plate and a movable plate between are described. The movable plate is connected to the first fixed plate and the second fixed plate by sealing elements. The movable plate is moved closer to or further from the first fixed plate by rotation of an actuator ring that rotates at least two rotary elements connected to the movable plate. A needle on the movable plate engages an opening in the valve to seal or open the valve to allow fluid flow. Methods of controlling flow of fluid through the variable orifice valve are also described.
Claims19
A variable orifice valve comprising:
- a first fixed plate at a first end of the variable orifice valve, the first fixed plate having a first side and a second side defining a first fixed plate thickness, the first fixed plate having an opening extending through the first fixed plate thickness;
- a second fixed plate at a second end of the variable orifice valve, the second fixed plate having a first side and a second side defining a second fixed plate thickness, the second fixed plate having an opening extending through the second fixed plate thickness, the first side of the second fixed plate facing and spaced from the second side of the first fixed plate;
- a movable plate positioned between the first fixed plate and the second fixed plate, the movable plate having a first side and a second side defining a movable plate thickness, the first side of the movable plate facing the second side of the first fixed plate and the second side of the movable plate facing the first side of the second fixed plate, the movable plate having a needle extending from the first side of the movable plate, the needle having a needle end sized to fit within the opening in the first fixed plate, the movable plate having at least one opening extending through the movable plate thickness adjacent the needle;
- a first sealing element between the first fixed plate and the movable plate;
- and
- a second sealing element between the second fixed plate and the movable plate.
Dependencies are inferred from the claim text.