Vacuum pump and vacuum evacuation system
AssigneeEdwards Japan Limited
InventorTakashi Kabasawa
Life of this patent
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Abstract
A vacuum pump and a vacuum exhaust system are provided that can improve the cleaning efficiency of a radical generator, effectively clear reaction products accumulating in the vacuum pump with fewer radical generators, and also reduce operating costs. A radical supply port 134A is disposed adjacent to an exhaust side outlet of an exhaust mechanism 132 and provided to extend through a housing 110A, and a radical supply means 135 supplies radicals 136 into the housing 110A through the radical supply port 134A and causes the supplied radicals 136 to flow to an area in which reaction products accumulate in the exhaust mechanism 132.
Claims8
A vacuum pump comprising:
- a housing having an inlet port and an outlet port;
- and
- an exhaust mechanism disposed inside the housing,
- the vacuum pump further comprising:
- a radical supply port that is disposed adjacent to an exhaust side outlet of the exhaust mechanism and provided to extend through the housing;
- and
- a radical supply means for supplying radicals into the housing through the radical supply port and causing the supplied radicals to flow to an area in which reaction products accumulate in the exhaust mechanism.
A vacuum exhaust system comprising:
- a vacuum pump including
- a housing having an inlet port and an outlet port,
- an exhaust mechanism disposed inside the housing, and
- a radical supply port that is disposed adjacent to an exhaust side outlet of the exhaust mechanism and provided to extend through the housing;
- and
- a radical supply means for supplying radicals into the housing through the radical supply port and causing the supplied radicals to be supplied to an area in which reaction products accumulate in the exhaust mechanism.
Dependencies are inferred from the claim text.