Seal mechanism for load port doors
AssigneeApplied Materials, Inc.
InventorsJames Christopher Hansen, Douglas Brian Baumgarten, Paul Benjamin Reuter
Life of this patent
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Abstract
A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The seal further includes a sealing portion configured to create an airtight seal between the first component and a second component, The sealing portion extends laterally offset from an end of a heel of the base portion. The sealing portion includes an at least partially curved cross-section curving in a first direction from the base portion to a segment substantially parallel with the base portion and further curving in a second direction away from the base portion.
Claims20
A seal comprising:
- a base portion configured to couple within a groove formed in a first surface of a first component;
- and
- a sealing portion configured to create an airtight seal between the first component and a second component, wherein the sealing portion extends laterally offset from an end of a heel of the base portion, wherein the sealing portion comprises an at least partially curved cross-section, the at least partially curved cross-section curving in a first direction from the base portion to a segment substantially parallel with the base portion and further curving in a second direction away from the base portion.
A load port door comprising:
- an exterior surface;
- an interior surface comprising a groove formed in the interior surface;
- and
- a seal coupled to the groove, wherein the seal comprises:
- a base portion configured to couple within the groove;
- and
- a sealing portion configured to create an airtight seal between the load port door and a frame of a load port, wherein the sealing portion extends laterally offset from an end of a heel of the base portion wherein the sealing portion comprises an at least partially curved cross-section, the at least partially curved cross-section curving in a first direction from the base portion to a segment substantially parallel with the base portion and further curving in a second direction away from the base portion.
A load port for receiving a substrate carrier, the load port comprising:
- a frame adapted for connecting the load port to a factory interface;
- a load port door comprising a first surface forming a groove;
- and
- a seal coupled to the groove formed in the first surface of the load port door, wherein the seal comprises:
- a base portion, wherein the seal is coupled to the groove of the load port door via the base portion;
- and
- a sealing portion extending laterally offset from an end of a heel of the base portion, wherein the sealing portion comprises an at least partially curved cross-section, the at least partially curved cross-section curving in a first direction from the base portion to a segment substantially parallel with the base portion and further curving in a second direction away from the base portion.
Dependencies are inferred from the claim text.