Optical biosensor device with optical signal enhancement structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Hsien Chang, Shih-Fen Huang, Chun-Ren Cheng, Fu-Chun Huang, Ching-Hui Lin
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Abstract
The present disclosure relates to an integrated chip including a semiconductor layer and a photodetector disposed along the semiconductor layer. A color filter is over the photodetector. A micro-lens is over the color filter. A dielectric structure comprising one or more dielectric layers is over the micro-lens. A receptor layer is over the dielectric structure. An optical signal enhancement structure is disposed along the dielectric structure and between the receptor layer and the micro-lens.
Claims20
An integrated chip, comprising:
- a semiconductor layer;
- a photodetector disposed along the semiconductor layer;
- a color filter over the photodetector;
- a micro-lens over the color filter;
- a dielectric structure comprising one or more dielectric layers over the micro-lens;
- a receptor layer over the dielectric structure;
- and
- an optical signal enhancement structure disposed along the dielectric structure and between the receptor layer and the micro-lens.
An integrated chip, comprising:
- a semiconductor layer;
- a plurality of photodetectors disposed along the semiconductor layer;
- a plurality of color filters over the plurality of photodetectors;
- a plurality of micro-lenses over the plurality of color filters;
- a dielectric structure comprising one or more dielectric layers over the plurality of micro-lenses;
- a first clad layer over the dielectric structure, wherein the first clad layer delimits a plurality of bioreaction chambers that are spaced apart along a top surface of the first clad layer;
- a receptor layer over the first clad layer and lining the first clad layer at the plurality of bioreaction chambers;
- a capping layer over the first clad layer and over the receptor layer, wherein a microfluidic channel extends through the capping layer along a top surface of the receptor layer and along the plurality of bioreaction chambers;
- and
- an optical signal enhancement structure disposed between the plurality of bioreaction chambers and the plurality of photodetectors and configured to enhance an optical signal emitted from bioreactions occurring along the plurality of bioreaction chambers.
A method for forming an integrated chip, the method comprising:
- forming a plurality of photodetectors along a semiconductor layer;
- forming a plurality of color filters over the plurality of photodetectors, respectively;
- forming a plurality of micro-lenses over the plurality of color filters, respectively;
- depositing a glue layer over the plurality of micro-lenses;
- forming an optical signal enhancement structure along a dielectric structure;
- forming a plurality of bioreaction chambers over the dielectric structure and over the optical signal enhancement structure;
- depositing a receptor layer along the plurality of bioreaction chambers;
- bonding a capping layer having a microfluidic channel therein over the receptor layer and over the plurality of bioreaction chambers;
- and
- bonding the dielectric structure over the plurality of photodetectors and along the glue layer such that the plurality of bioreaction chambers are disposed over the plurality of photodetectors.
Dependencies are inferred from the claim text.