Microelectronic devices with pillars extending through upper and lower tiered stack structures and an intermediate dielectric region
AssigneeLodestar Licencing Group LLC
InventorYi Hu
Life of this patent
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AssigneeLodestar Licencing Group LLC
InventorYi Hu
Estimating the term…
Methods for forming microelectronic devices include forming lower and upper stack structures, each comprising vertically alternating sequences of insulative and other structures arranged in tiers. Lower and upper pillar structures are formed to extend through the lower and upper stack structures, respectively. An opening is formed through the upper stack structure, and at least a portion of the other structures of the upper stack are replaced by (e.g., chemically converted into) conductive structures, which may be configured as select gate structures. Subsequently, a slit is formed, extending through both the upper and lower stack structures, and at least a portion of the other structures of the lower stack structure are replaced by a conductive material within a liner to form additional conductive structures, which may be configured as access lines (e.g., word lines). Microelectronic devices and structures and related electronic systems are also disclosed.
A microelectronic device, comprising:
A microelectronic device, comprising:
A microelectronic device, comprising:
Dependencies are inferred from the claim text.