Vertical cavity surface emitting laser device with dummy posts for bonding

A vertical cavity surface emitting laser (VCSEL) device, comprising:

• a substrate having a first surface and a second surface opposite the first surface;
• a VCSEL array comprising a plurality of VCSELs disposed on the first surface of the substrate,
• wherein the plurality of VCSELs are configured for backside emission through the substrate,
• wherein respective emission areas for the plurality of VCSELs are defined on the second surface of the substrate, and
• wherein the respective emission areas define a perimeter of an emission region of the VCSEL device;
• an anti-reflection (AR) coating on the second surface of the substrate;
• and
• a plurality of dummy posts disposed on the AR coating,
• wherein the plurality of dummy posts are positioned within the emission region, outside of the respective emission areas for the plurality of VCSELs.

A vertical cavity surface emitting laser (VCSEL) device, comprising:

• a substrate having a first surface and a second surface opposite the first surface;
• a VCSEL array comprising a plurality of VCSELs disposed on the first surface of the substrate,
• wherein the plurality of VCSELs are configured for backside emission through the substrate,
• wherein respective emission areas for the plurality of VCSELs are defined on the second surface of the substrate, and
• wherein the respective emission areas define a perimeter of an emission region of the VCSEL device;
• an anti-reflection (AR) coating on the second surface of the substrate;
• and
• a plurality of dummy posts disposed on the second surface of the substrate and extending through openings in the AR coating,
• wherein the plurality of dummy posts are positioned within the emission region, outside of the respective emission areas for the plurality of VCSELs.