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US 2025/0345970 A1Published application
Film forming apparatus, film forming method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorKAZUKI ARAI
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Abstract
A film forming apparatus includes a movable stage; a substrate holder supported by the movable stage and configured to hold a substrate; a coupling configured to couple the movable stage and the substrate holder; and a curing unit configured to cure a curable composition on the substrate, wherein the coupling includes: a kinematic coupling; and an attraction force generator configured to generate, between the movable stage and the substrate holder, an attraction force for fixing the substrate holder to the movable stage.
Claims12
A film forming apparatus comprising:
- a movable stage;
- a substrate holder supported by the movable stage and configured to hold a substrate;
- a coupling configured to couple the movable stage and the substrate holder;
- and
- a curing unit configured to cure a curable composition on the substrate,
- wherein the coupling includes:
- a kinematic coupling;
- and
- an attraction force generator configured to generate, between the movable stage and the substrate holder, an attraction force for fixing the substrate holder to the movable stage.
6 more elements
Dependencies are inferred from the claim text.