Cathodic arc source

A cathodic arc evaporation apparatus comprising:

• a target as cathode having a front-target surface of a material to be evaporated, comprising an active target surface where magnetic field lines enter the active target surface in an acute angle α≤45°;
• a back-target surface, parallel to the front-target surface but facing a target back plate placed in the opposite side in relation to the front-target surface;
• a side-target surface connecting the front-target surface with the back-target surface;
• an electrically floating confinement located adjacent and, comprising an inner surface and an outer surface, wherein the side-target surface is closer to the inner surface of the confinement than to the outer surface of the confinement;
• an electrode as anode having an inner surface for acting as electron receiving surface;
• and
• a magnetic guidance system adapted to provide magnetic fields comprising magnetic field lines located in front of the front-target surface,
• wherein the inner surface of the confinement is placed:
• between the front-target surface and the electron receiving surface of the anode, the distance considered in a perpendicular plane in relation to the front-target surface, and/or
• between the side-target surface and the electron receiving surface of the anode, the distance considered in a parallel plane in relation to the front-target surface, and
• wherein the magnetic guidance system is designed and adjusted for producing the following magnetic fields regions:
• a first region comprising magnetic field lines located in front of the front-target surface which exit the front-target surface and end in the inner surface of confinement member, and/or
• a second region comprising magnetic field lines located in front of the front-target surface which exit the front-target surface and end in the electron receiving surface of the anode.