Display device, electronic device, and manufacturing method of display device
AssigneeSamsung Display Co., Ltd.
InventorEOK SU KIM
Life of this patent
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Abstract
A display device includes a base substrate, a transistor including a gate electrode and a semiconductor pattern, the semiconductor pattern including a source region, an active region, and a drain region and located on the base substrate, a gate insulating pattern layer on the semiconductor pattern, and a connection electrode electrically connected to the semiconductor pattern and being on the gate insulating pattern layer, wherein the gate electrode and the connection electrode are at a same layer, each of the gate electrode and the connection electrode includes a first conductive layer and a second conductive layer on the first conductive layer, and no through hole is defined in the semiconductor pattern.
Claims20
A display device comprising:
- a base substrate;
- a transistor comprising a gate electrode and a semiconductor pattern, the semiconductor pattern including a source region, an active region, and a drain region and located on the base substrate;
- a gate insulating pattern layer on the semiconductor pattern;
- and
- a connection electrode electrically connected to the semiconductor pattern and being on the gate insulating pattern layer,
- wherein the gate electrode and the connection electrode are at a same layer,
- wherein each of the gate electrode and the connection electrode comprises a first conductive layer and a second conductive layer on the first conductive layer, and
- wherein no through hole is defined in the semiconductor pattern.
An electronic device comprising:
- a display module;
- a window on the display module;
- and
- a housing under the display module;
- wherein the display module comprises:
- a base substrate;
- a transistor comprising a gate electrode and a semiconductor pattern, the semiconductor pattern including a source region, an active region, and a drain region and located on the base substrate;
- a gate insulating pattern layer on the semiconductor pattern;
- and
- a connection electrode electrically connected to the semiconductor pattern and being on the gate insulating pattern layer,
- wherein the gate electrode and the connection electrode are at a same layer,
- wherein each of the gate electrode and the connection electrode comprises a first conductive layer comprising a first metal, and a second conductive layer comprising a second metal different from the first metal and located on the first conductive layer, and
- wherein the second metal is not etched by an etching solution that etches the first metal.
A manufacturing method of a display device, the manufacturing method comprising:
- providing a preliminary display panel comprising a base substrate, a preliminary semiconductor pattern on the base substrate, and a gate insulating pattern layer having an insulating layer opening exposing a portion of the preliminary semiconductor pattern, the gate insulating pattern layer being on the preliminary semiconductor pattern;
- forming a semiconductor pattern by doping a portion of the preliminary semiconductor pattern exposed by the insulating layer opening;
- and
- forming a gate electrode and a connection electrode on the gate insulating pattern layer,
- wherein the forming of the gate electrode and the connection electrode comprises:
- forming a first conductive layer on the gate insulating pattern layer and forming a second conductive layer on the first conductive layer;
- patterning the second conductive layer through wet etching;
- and
- patterning the first conductive layer through dry etching.
Dependencies are inferred from the claim text.