Sensing method for cylindrical surfaces
AssigneeUltra Clean Holdings, Inc.
InventorsJAMES PRADUN, Michael RAMACCIOTTI, Genaro RODRIGUEZ, Alan CAMYRE, Jon HYLBERT
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AssigneeUltra Clean Holdings, Inc.
InventorsJAMES PRADUN, Michael RAMACCIOTTI, Genaro RODRIGUEZ, Alan CAMYRE, Jon HYLBERT
Estimating the term…
Provided herein is an apparatus and method for sensing the temperature of a tubing wall, and inferentially the temperature of a fluid within the tubing. The apparatus includes first and second clamp bodies, the first clamp body comprising a heat transfer element and a first and a second electrical connection connected thereto, the second clamp body connectable to the first clamp body to form a clamping cavity therebetween within which a clamped element having a wall is securable, the heat transfer element configured to contact an outer surface of a clamped element therebetween. The heat transfer element may include a thermally conductive compliant element extending through one of the clamp bodies and inwardly of the clamping cavity.
An apparatus for receiving an element having a wall, comprising;
A method for heat transfer between an element and a thermal device, comprising;
Dependencies are inferred from the claim text.