Memory device and method of fabricating the same
AssigneeMacronix International Co., Ltd.
InventorsKuan-Wei Wu, Yao-Wen Chang, I-Chen Yang
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AssigneeMacronix International Co., Ltd.
InventorsKuan-Wei Wu, Yao-Wen Chang, I-Chen Yang
Estimating the term…
A memory device includes a composite stacked structure, a channel pillar, charge storage units, a tunneling layer, and at least one blocking layer. A first stacked structure includes insulating layers and conductive layers stacked alternately over a first region. A second stacked structure includes the insulating layers and intermediate layers alternately stacked over a second region. The charge storage units are embedded in the first stacked structure, and is located between the channel pillar and the conductive layers. The at least one blocking layer is disposed between the charge storage units and the conductive layers. A thickness of one of the plurality of the charge storage units is greater than a thickness of a corresponding conductive layer. The memory device is applicable to 3D NAND flash memory to create memory devices with high capacity and performance.
A memory device, comprising:
A method of fabricating a memory device, comprising:
Dependencies are inferred from the claim text.