Temperature compensated surface acoustic wave device with different types of resonators
AssigneeSkyworks Solutions, Inc.
InventorsQiuyan Zhou, Nan Wu, Yiliu Wang
Life of this patent
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Abstract
A surface acoustic wave device and a method of forming the surface acoustic wave device are disclosed. The surface acoustic wave device can include a piezoelectric layer, a first resonator and a second resonator in electrical communication with the piezoelectric layer, a temperature compensation layer over the first resonator and the second resonator, and a passivation layer over the temperature compensation layer. The first resonator has a different resonator type from the second resonator. A first thickness of the passivation layer over the first resonator is different from a second thickness of the passivation layer over the second resonator.
Claims20
A surface acoustic wave device comprising:
- a piezoelectric layer;
- a first resonator and a second resonator in electrical communication with the piezoelectric layer, the first resonator having a different resonator type from the second resonator;
- a temperature compensation layer over the first resonator and the second resonator;
- and
- a passivation layer over the temperature compensation layer, a first thickness of the passivation layer over the first resonator being different from a second thickness of the passivation layer over the second resonator.
A method of manufacturing a surface acoustic wave device, the method comprising:
- providing a piezoelectric layer;
- forming a first resonator and a second resonator in electrical communication with the piezoelectric layer, the first resonator having a different resonator type from the second resonator;
- forming a temperature compensation layer over the first resonator and the second resonator;
- and
- forming a passivation layer over the temperature compensation layer, a first thickness of the passivation layer over the first resonator being different from a second thickness of the passivation layer over the second resonator.
An acoustic wave filter for filtering a radio frequency signal, the acoustic wave filter comprising:
- a plurality of resonators in electrical communication with a piezoelectric layer, the plurality of resonators including a first resonator and a second resonator, the first resonator having a different resonator type from the second resonator;
- a temperature compensation layer over the first resonator and the second resonator;
- and
- a passivation layer over the temperature compensation layer, a first thickness of the passivation layer over the first resonator being different from a second thickness of the passivation layer over the second resonator.
Dependencies are inferred from the claim text.