Via bars interleaved with capacitor structure
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsEe Jan KHOR, Wanbing YI
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to via bars interleaved between conductive plates of a capacitor structure and methods of manufacture. The structure includes: a capacitor structure having a plurality of capacitor plates within layers of dielectric material; a wiring structure in a lower layer of the dielectric material, the wiring structure electrically connecting to one of the capacitor plates; and a plurality of via bars within the layers of dielectric material and interleaved with the plurality of capacitor plates. The plurality of via bars have a different width dimension than the plurality of capacitor plates.
Claims20
A structure comprising:
- a capacitor structure comprising a plurality of capacitor plates within layers of dielectric material;
- a wiring structure in a lower layer of the dielectric material, the wiring structure electrically connecting to one of the capacitor plates;
- and
- a plurality of via bars within the layers of dielectric material and interleaved with the plurality of capacitor plates, the plurality of via bars comprising a different width dimension than the plurality of capacitor plates.
A structure comprising:
- a plurality of capacitor plates;
- a wiring structure electrically connecting to one of the capacitor plates;
- and
- a plurality of via bars interleaved with the plurality of capacitor plates, the plurality of via bars comprising a smaller width dimension than the plurality of capacitor plates.
A method comprising:
- forming a capacitor structure comprising a plurality of capacitor plates within layers of dielectric material;
- forming a wiring structure in a lower layer of the dielectric material, the wiring structure electrically connecting to one of the capacitor plates;
- and
- forming a plurality of via bars within the layers of dielectric material and interleaved with the plurality of capacitor plates, the plurality of via bars comprising a different width dimension than the plurality of capacitor plates.
Dependencies are inferred from the claim text.