System, apparatus and method for selective surface treatment
AssigneeASML Netherlands B.V.
InventorDennis Dominic VAN DER VOORT
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Abstract
Disclosed herein is a shielding system for use in a surface treatment process, comprising a first disk and a second disk. The first disk and second disk being arranged substantially parallel to each other. The first disk comprises a slit-shaped opening, the second disk comprises a plurality of openings: and the first and second disk are arranged to move with respect to each other around a common axis. Herewith, the slit can be positioned at one or more openings of the plurality of openings to form a passage through the shielding system.
Claims21
1-15. (canceled)
A shielding system for use in a surface treatment process of an object, comprising:
- a first disk and a second disk;
- the first disk and second disk being arranged substantially parallel to each other;
- the first disk having a slit-shaped opening;
- and
- the second disk comprising a plurality of openings,
- wherein the first and second disk are arranged to move with respect to each other around a common axis, whereby the slit can be positioned at one or more openings of the plurality of openings to form a passage through the shielding system, and
- wherein the passage is configured to expose only a selected area on a surface of the object subjected to the surface treatment process.
Dependencies are inferred from the claim text.